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SEMI F19 : 2015

SEMI F19 : 2015

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the wetted surface characterization requirements and the finish acceptance criteria for tubing and components fabricated in stainless steel per SEMI F20 and intended to control or contain gases and liquids used in semiconductor manufacturing.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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