09/30196967 DC : 0
Current
The latest, up-to-date edition.
BS EN ISO 25178-603 - GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS
Hardcopy , PDF
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Metrological characteristics of the instrument
4 Description of the metrological characteristics
4.1 General
4.2 Overview
4.3 Metrological characteristics
Annex A (informative) - Components of a phase shifting
interferometric (PSI) microscope
Annex B (informative) - Phase shifting interferometric (PSI)
microscope - Theory of operation
Annex C (informative) - Errors and corrections for phase
shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS matrix model
Bibliography
BS EN ISO 25178-603
| Committee |
TDW/4
|
| DocumentType |
Draft
|
| Pages |
26
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Standards | Relationship |
| PREN ISO 25178-603 : DRAFT 2009 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) — Masterplan |
| ISO 14978:2006 | Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment |
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