ASTM F 1261M : 1996 : R2003
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric] (Withdrawn 2009)
Hardcopy , PDF
31-05-2009
English
10-06-1996
CONTAINED IN VOL. 10.04, 2009 Determines the average electrical width of a narrow thin-film metallization line. This is meant for measuring thin metallization lines such as are used in microelectronic circuits where the width of the lines can range from micrometers to tenths of micrometers.
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