BS EN 62047-2:2006
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
Hardcopy , PDF
English
30-11-2006
1 Scope
2 Normative references
3 Symbols and designations
4 Testing method and test apparatus
4.1 Method of gripping
4.2 Method of loading
4.3 Speed of testing
4.4 Force measurement
4.5 Elongation measurement
4.6 Stress-strain curve
4.7 Environment control
5 Test piece
5.1 General
5.2 Plane shape of test piece
5.3 Test piece thickness
5.4 Gauge mark
6 Test report
Annex A (informative) Test piece grip methods
Annex B (normative) Testing conditions
Annex C (informative) Test piece
Annex ZA (normative) Normative references to international
publications with their corresponding
European publications
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
| Committee |
EPL/47
|
| DocumentType |
Standard
|
| Pages |
16
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices. The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features.
| Standards | Relationship |
| EN 62047-2:2006 | Identical |
| NF EN 62047-2 : 2006 | Identical |
| NBN EN 62047-2 : 2007 | Identical |
| IEC 62047-2:2006 | Identical |
| DIN EN 62047-2:2007-02 | Identical |
| I.S. EN 62047-2:2006 | Identical |
| EN 60317-0-5:1994/A2:2000 | Identical |
| UNE-EN 62047-2:2006 | Equivalent |
| ISO 6892:1998 | Metallic materials — Tensile testing at ambient temperature |
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