BS EN 62276:2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Single crystal wafers for surface acoustic wave (SAW) device applications. Specifications and measuring methods
Hardcopy , PDF
English
31-12-2016
30-04-2025
| Committee |
W/-
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| DevelopmentNote |
Supersedes BS PD IEC/PAS 62276. (02/2006) Supersedes 03/108069 DC. (03/2006) Supersedes 09/30207175 DC. (02/2013) Supersedes 15/30318551 DC. (12/2016)
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| DocumentType |
Standard
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| Pages |
46
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| PublisherName |
British Standards Institution
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
IEC 62276:2016 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators. This edition includes the following significant technical changes with respect to the previous edition:
- Corrections of Euler angle indications in Table 1 and axis directions in Figure 3.
- Definition of \'twin\' is not explained clearly enough in 3.3.3. Therefore it is revised by a more detailed definition.
- Etch channels maximum number at quartz wafer of seed which do not pass through from surface to back surface are classified for three grades in 4.2.13 a). Users use seed portions of quartz wafers for devices. They request quartz wafers with less etch channels in seeds to reduce defects of devices. The classification of etch channels in seed may prompt a rise in quartz wafer quality.
| Standards | Relationship |
| IEC 62276:2016 | Identical |
| NBN EN 62276 : 2013 | Identical |
| I.S. EN 62276:2016 | Identical |
| DIN EN 62276:2015-04 (Draft) | Identical |
| EN 62276:2016 | Identical |
| NF EN 62276 : 2013 | Identical |
| EN 60335-2-3:2002/A11:2010 | Identical |
| UNE-EN 62276:2016 | Equivalent |
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