BS ISO 21270:2004
Current
The latest, up-to-date edition.
Surface chemical analysis. X-ray photoelectron and Auger electron spectrometers. Linearity of intensity scale
Hardcopy , PDF
English
31-03-2005
Foreword
Introduction
1 Scope
2 Normative reference
3 Symbols
4 Outline of the methods
5 When to use this International Standard
6 Procedure for evaluating the intensity linearity
6.1 The samples
6.2 Preparing the copper sample
6.3 Preparing the stainless-steel sample or sample
holder
6.4 Choosing the spectrometer settings for which the
intensity linearity measurement is required
6.5 Operating the instrument
6.6 Measurement of the intensity scale linearity by
varying the source flux
6.7 Determination of the intensity scale linearity
by varying the source flux
6.8 Measurement of the intensity scale linearity in
XPS using the spectrum ratio method for systems
with two or more but less than 30 X-ray source
emission current settings
6.9 Determination of the intensity scale linearity in
XPS using the spectrum ratio method for systems
with two or more but less than 30 X-ray source
emission current settings
6.10 Completing the analysis
Annex A (informative) Example results of linearity measurements
using the spectrum ratio method
(the second method)
Bibliography
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