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DIN EN 62047-21:2015-04

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS (IEC 62047-21:2014)

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

01-01-2015

$183.79
Including GST where applicable

DocumentType
Standard
Pages
16
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current

Standards Relationship
EN 62047-21:2014 Identical
IEC 62047-21:2014 Identical

$183.79
Including GST where applicable