DIN ISO 18516:2020-11
Current
The latest, up-to-date edition.
Surface chemical analysis – Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English
Hardcopy , PDF
English
01-11-2020
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis.
| Committee |
TC 201
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Current
|
| Standards | Relationship |
| ISO 18516:2019 | Identical |
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