EN ISO 14644-2:2015

European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Creating, implementing and maintaining a
  monitoring plan
5 Periodic classification of air cleanliness by
  particle concentration
Annex A (informative) - Matters to consider when
        developing a monitoring plan
Annex B (informative) - Considerations for setting
        alert and action levels
Bibliography

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.