EN ISO 14644-3:2005

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
  3.1 General
  3.2 Airborne particle measurement
  3.3 Air filters and systems
  3.4 Airflow and other physical states
  3.5 Electrostatic measurement
  3.6 Measuring apparatus and measuring conditions
  3.7 Occupancy states
4 Test procedures
  4.1 Cleanroom tests
  4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of an
        installation and the sequence in which to carry
        them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.