I.S. EN ISO 14644-9:2022
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
Hardcopy , PDF
English
07-06-2022
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Foreword
Introduction
1 Scope
2 Normative references.
3 Terms and definitions
4 Abbreviated terms
5 The surface cleanliness level assessment system
6 Demonstration of conformity
Annex A (informative) Surface characteristics
Annex B (informative) Descriptor for specific particle size ranges
Annex C (informative) Parameters influencing the SCP grading level assessments
Annex D (informative) Measurement methods for determining surface cleanliness by particle concentration
Bibliography
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