ISO 11952:2019
Current
The latest, up-to-date edition.
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
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English
21-05-2019
This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
This document has the following objectives:
— to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;
— to define the minimum requirements for the calibration process and the conditions of acceptance;
— to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument);
— to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);
— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;
— to define the requirements for reporting results.
| Committee |
ISO/TC 201/SC 9
|
| DocumentType |
Standard
|
| Pages |
58
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| JIS K 0159:2021 | Identical |
| NEN-ISO 11952 : 2019 | Identical |
| BS ISO 11952:2019 | Identical |
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