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ISO 14594:2024

Current

Current

The latest, up-to-date edition.

Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Available format(s)

Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

07-06-2024

$213.40
Including GST where applicable

This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.

This document is applicable for the analysis of a well-polished specimen using normal beam incidence.

This document does not apply to energy dispersive X-ray spectroscopy.

DocumentType
Standard
Pages
18
PublisherName
International Organization for Standardization
Status
Current
Supersedes

$213.40
Including GST where applicable