ISO 14644-12:2018
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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English
30-08-2018
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
| DocumentType |
Standard
|
| Pages |
11
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Standards | Relationship |
| NEN-ISO 14644-12:2018 | Identical |
| BS ISO 14644-12:2018 | Identical |
| SS-ISO 14644-12 : 2018 | Identical |
| I.S. EN ISO 14644-3:2019&LC:2020 | Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06) |
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