ISO 14644-8:2013
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
View Superseded by
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)
Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users
French, English
18-02-2013
09-04-2025
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.
ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.
ISO 14644-8:2013 does not give a classification of surface chemical contamination.
| Committee |
ISO/TC 209
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| DevelopmentNote |
Supersedes ISO/DIS 14644-8. (02/2013)
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| DocumentType |
Standard
|
| Pages |
22
|
| ProductNote |
THIS STANDARD ALSO REFERS ISO 14698 , IEST-G-CC035, ASTM D5127-99, SEMI E108-0307, IEST-RP-CC031.2, JIS B9917-8:2010, SEMI E45-1101,SEMI E460307, SEMI F21-1102 .
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| PublisherName |
International Organization for Standardization
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| Status |
Withdrawn
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| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| DIN EN ISO 14644-8:2013-06 | Identical |
| GOST R ISO 14644-8 : 2014 | Identical |
| NBN EN ISO 14644-8 : 2013 | Identical |
| NF EN ISO 14644-8 : 2013 | Identical |
| NEN EN ISO 14644-8 : 2013 | Identical |
| NS EN ISO 14644-8 : 2013 | Identical |
| I.S. EN ISO 14644-8:2013 | Identical |
| PN EN ISO 14644-8 : 2013 | Identical |
| SS-EN ISO 14644-8 : 2013 | Identical |
| BS EN ISO 14644-8:2013 | Identical |
| EN ISO 14644-8:2013 | Identical |
| UNE-EN ISO 14644-8:2014 | Identical |
A newer version of this standard is available.