ISO 19606:2024
Current
The latest, up-to-date edition.
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
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English
01-11-2024
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1nm to 30nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04μm to 2,5μm.
| DocumentType |
Standard
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| Pages |
24
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| PublisherName |
International Organization for Standardization
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| Status |
Current
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| Supersedes |
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