ISO 25178-604:2025
Current
The latest, up-to-date edition.
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users
English, French
14-02-2025
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
| DocumentType |
Standard
|
| Pages |
23
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| NS-EN ISO 25178-604:2025 | Identical |
| I.S. EN ISO 25178-604:2025 | Equivalent |
| BS EN ISO 25178-604:2025 | Equivalent |
| UNE-EN ISO 25178-604:2025 | Equivalent |
| DS/EN ISO 25178-604:2025 | Identical |
| DS/ISO 25178-604:2025 | Identical |
| DIN EN ISO 25178-604:2025-12 | Equivalent |
| UNE-EN ISO 25178-604:2025 | Identical |
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