ISO 29301:2023
Current
The latest, up-to-date edition.
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
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English
16-10-2023
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon.
This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar.
This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
| Committee |
ISO/TC 202/SC 3
|
| DocumentType |
Standard
|
| Pages |
44
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
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