ISO/FDIS 25178-603
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
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13-11-2024
14-02-2025
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| Committee |
ISO/TC 213
|
| DocumentType |
Draft
|
| Pages |
18
|
| PublisherName |
International Organization for Standardization
|
| RevisionOf | |
| Status |
Superseded
|
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