ISO/FDIS 25178-604
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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13-11-2024
14-02-2025
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
| Committee |
ISO/TC 213
|
| DocumentType |
Draft
|
| Pages |
23
|
| PublisherName |
International Organization for Standardization
|
| RevisionOf | |
| Status |
Superseded
|
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