ISO/TR 19319:2013
Current
The latest, up-to-date edition.
Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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English
06-03-2013
ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
| Committee |
ISO/TC 201/SC 2
|
| DocumentType |
Technical Report
|
| Pages |
116
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| SAC GB/T 29556 : 2013 | Identical |
| PD ISO/TR 19319:2013 | Identical |
| NEN NPR ISO/TR 19319 : 2004 | Identical |
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