Surface chemical analysis. Analysis of metal oxide films by glow-discharge optical-emission spectrometry

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

16-08-2019

Publisher

British Standards Institution

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1nm to 10000nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Committee	CII/60
DocumentType	Standard
ISBN	9780539061345
Pages	48
PublisherName	British Standards Institution
Status	Current
Supersedes	DD ISO/TS 25138:2010

Standards	Relationship
ISO/TS 25138:2019	Identical

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PD ISO/TS 25138:2019

Surface chemical analysis. Analysis of metal oxide films by glow-discharge optical-emission spectrometry

Abstract

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