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UNE-EN 62047-9:2011

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-06-2012

$147.33
Including GST where applicable

Committee
CTN 209/SC 47
DocumentType
Standard
Pages
29
ProductNote
This standard also refers to ASTM E399-06e2
PublisherName
Asociación Española de Normalización
Status
Current

Standards Relationship
I.S. EN 62047-9:2011 Equivalent
BS EN 62047-9:2011 Equivalent
EN 62047-9:2011 Identical
IEC 62047-9:2011 Identical

$147.33
Including GST where applicable