01/122934 DC : DRAFT AUG 2001
Superseded
Superseded
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BS EN ISO 14644-5 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 5: OPERATIONS
Published date
11-23-2012
Publisher
Superseded date
08-20-2004
Superseded by
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Summarise this standard
AI-generated summary
Foreword
Introduction
1 Scope
2 Normative references
3 Term(s) and definition(s)
4 Specification of requirements
Annex A (informative) Operational systems
Annex B (informative) Cleanroom clothing
Annex C (informative) Personnel
Annex D (informative) Stationary equipment
Annex E (informative) Materials and portable equipment
Annex F (informative) Cleanroom cleaning
Bibliography
BS EN ISO 14644-5
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
Sorry this product is not available in your region.