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02/123800 DC : DRAFT OCT 2002

Withdrawn

Withdrawn

BS EN ISO 14644-3 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: METROLOGY AND TEST METHODS

Published date

11-23-2012

Withdrawn date

07-23-2013

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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
   3.1 General
   3.2 Airborne particle measurement
   3.3 Air filters and systems
   3.4 Airflow and other physical states
   3.5 Electrostatic measurement
   3.6 Measuring apparatus and measuring conditions
   3.7 Occupancy states
4 Test procedures
   4.1 Recommended tests
   4.2 Principle
5 Test report
Annex A (informative) Choice of recommended tests of an installation
        and the sequence in which to carry them out
      A.1 Recommended test procedures
Annex B (informative) Recommendations for test methods
      B.1 Airborne particle count for classification and test
           measurement of cleanrooms and separative devices
      B.2 Airborne particle count for ultrafine particles
      B.3 Airborne particle count for macroparticle
      B.4 Air pressure difference test
      B.5 Air pressure difference test
      B.6 Installed filter system leakage test
      B.7 Airflow visualization
      B.8 Airflow direction test
      B.9 Temperature test
      B.10 Humidity test
      B.11 Electrostatic and ion generator test
      B.12 Particle deposition test
      B.13 Recovery test
      B.14 Containment leak test
Annex C (informative) Test apparatus
      C.1 Airborne particle count
      C.2 Ultrafine particle count
      C.3 Macroparticle count
      C.4 Airflow test
      C.5 Air pressure difference
      C.6 Installed filter leakage test
      C.7 Airflow visualization
      C.8 Airflow direction test
      C.9 Temperature test
      C.10 Humidity test
      C.11 Electrostatic and ion generator test
      C.12 Particle deposition test
      C.13 Recovery test
      C.14 Containment leak test
Bibliography

BS EN ISO 14644-3

Committee
LBI/30
DocumentType
Draft
PublisherName
British Standards Institution
Status
Withdrawn

ASTM F 328 : 1998 Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles
ISO 14644-2:2015 Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 7726:1998 Ergonomics of the thermal environment — Instruments for measuring physical quantities
ISO 14644-1:2015 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up

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