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Superseded
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BS EN 62047-11 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR LINEAR THERMAL EXPANSION COEFFICIENTS OF MEMS MATERIALS
Hardcopy , PDF
English
10-31-2013
FOREWORD
1 Scope
2 Normative References
3 Symbols and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (Informative) - Test piece fabrication
Annex B (Informative) - Test piece handling example
Annex C (Informative) - Test apparatus and test piece
releasing process
Annex D (Informative) - Data analysis example
BS EN 62047-11
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
14
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
| IEC 62047-3:2006 | Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing |
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