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BS EN 62047-17 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 17: BULGE TEST METHOD FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS
Hardcopy , PDF
English
07-31-2015
FOREWORD
1 Scope
2 Normative References
3 Terms, definitions and symbols
4 Principle of bulge test
5 Test method
6 Test piece
7 Test procedure and analysis
8 Test report
Annex A (informative) - Data analysis
Annex B (informative) - Example of test piece
fabrication: MEMS process
Annex C (Informative) - Deformation measurement
techniques
Bibliography
BS EN 62047-17
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
26
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
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