13/30293217 DC : 0
Superseded
View Superseded by
BS EN 62047-1 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
Hardcopy , PDF
English
04-30-2016
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
Annex A (informative) - Standpoint and
criteria in editing this glossary
Annex B (informative) - Clause cross-references
from the first edition of IEC 62047-1
BS EN 62047-1.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
28
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
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