14/30294910 DC : 0
Superseded
View Superseded by
BS EN 62047-26 ED1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
Hardcopy , PDF
English
05-31-2016
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a
micrometer scale
5 Description of needle structures in a
micrometer scale
6 Measurement method
Annex A (informative) - Examples of measurement for
trench & needle structures in a micrometer scale
Annex B (informative) - Uncertainty in Dimensional
Measurement
Bibliography
BS EN 62047-26 Ed1.0.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
29
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| ISO 129-1:2004 | Technical drawings — Indication of dimensions and tolerances — Part 1: General principles |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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