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BS EN 62047-34 ED.1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 34: TEST METHOD FOR MEMS PIEZORESISTIVE PRESSURE-SENSITIVE DEVICE ON WAFER
Hardcopy , PDF
English
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test conditions
5 General provisions
6 Test items and methods
BS EN 62047-34 Ed.1.0.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
17
|
| PublisherName |
British Standards Institution
|
| Status |
NA
|
| IEC 60747-14-3:2009 | Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors |
| IEC 60410:1973 | Sampling plans and procedures for inspection by attributes |
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