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BS EN 62047-3:2006

BS EN 62047-3:2006

Current

Current

The latest, up-to-date edition.

Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

11-30-2006

Publisher

British Standards Institution

Scope
2 Normative references
3 Test piece materials
4 Test piece fabrications
5 Plane shape of test piece
6 Test piece thickness
7 Gauge mark
8 Test
9 Document attached to standard test pieces
Annex A (informative) Test piece
Annex ZA (normative) Normative references to international
         publications with their corresponding European
         publications

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

Committee
EPL/47
DevelopmentNote
Supersedes 05/30104054 DC (12/2006)
DocumentType
Standard
Pages
12
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
NBN EN 62047-3 : 2007 Identical
I.S. EN 62047-3:2006 Identical
NF EN 62047-3 : 2006 Identical
EN 62047-3 : 2006 Identical
DIN EN 62047-3:2007-02 Identical
IEC 62047-3:2006 Identical

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
EN 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 17561:2016 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for elastic moduli of monolithic ceramics at room temperature by sonic resonance

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Hardcopy - English
PDF - English
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