BS EN 62047-8:2011
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Strip bending test method for tensile property measurement of thin films
06-30-2011
1 Scope
2 Normative references
3 Terms and definitions
4 Test apparatus
5 Test piece
6 Test procedure and analysis
7 Test report
Annex A (informative) - Data analysis: Test results by using
nanoindentation apparatus
Annex B (informative) - Test piece fabrication: MEMS process
Annex C (informative) - Effect of misalignment and geometry
on property measurement
Bibliography
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