BS EN ISO 14644-15:2026
Current
Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration
Hardcopy , PDF
English
05-21-2026
| Committee |
LBI/30
|
| DocumentType |
Standard
|
| Pages |
28
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO14644-8). This document does not apply to the following: health and safety requirements; compatibility with cleaning agents and techniques; cleanability; biocontamination; specific requirements of equipment and materials for processes and products; design details of equipment.
| Standards | Relationship |
| I.S. EN ISO 14644-15:2026 | Equivalent |
| EN ISO 14644-15:2026 | Equivalent |
| ISO 14644-15:2026 | Equivalent |
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