BS EN ISO 14644-4:2001

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
5 Planning and design
  5.1 Planning procedure
  5.2 Design
6 Construction and start-up
7 Testing and approval
  7.1 General
  7.2 Construction approval
  7.3 Functional approval
  7.4 Operational approval
8 Documentation
  8.1 General
  8.2 Record of an installation
  8.3 Operational instructions
  8.4 Instructions for performance monitoring
  8.5 Maintenance instructions
  8.6 Maintenance record
  8.7 Record of operation and maintenance training
Annex A (informative) Control and segregation concepts
Annex B (informative) Classification examples
Annex C (informative) Approval of an installation
Annex D (informative) Layout of an installation
Annex E (informative) Construction and materials
Annex F (informative) Environmental control of cleanrooms
Annex G (informative) Control of air cleanliness
Annex H (informative) Additional specification of
        requirements to be agreed upon between
        purchaser/user and designer/supplier
Bibliography

Describes requirements for the design and construction of cleanroom installations but does not prescribe specific technological or contractual means to meet these requirements.

This part of ISO14644 specifies requirements for the design and construction of cleanroom installations but does not prescribe specific technological or contractual means to meet these requirements. It is intended for use by purchasers, suppliers and designers of cleanroom installations and provides a checklist of important parameters of performance. Construction guidance is provided, including requirements for start-up and qualification. Basic elements of design and construction needed to ensure continued satisfactory operation are identified through the consideration of relevant aspects of operation and maintenance.

NOTE Further guidance in respect of the above requirements is given in annexesA to H. Other parts of ISO14644 may provide complementary information.

Application of this part of ISO14644 is restricted in the following:

• user requirements are represented by purchaser or specifier;

• specific processes to be accommodated in the cleanroom installation are not specified;

• fire and safety regulations are not considered specifically; the appropriate national and local requirements should be respected;

• process media and utility services are only considered with respect to their routing between and in the different zones of cleanliness;

• regarding initial operation and maintenance, only cleanroom construction-specific requirements are considered.