BS ISO 16700:2016
Current
Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification
Hardcopy , PDF
English
07-31-2016
| Committee |
CII/9
|
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
| Standards | Relationship |
| ISO 16700:2016 | Identical |
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