BS ISO 29301:2017

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Image magnification
5 Reference materials
6 Calibration procedures
7 Accuracy of image magnification
8 Uncertainty of measurement result
9 Calibration report
Annex A (informative) - Parameters that influence
        the resultant magnification of a TEM
Annex B (informative) - Flowchart of image-magnification
        calibration procedure
Annex C (informative) - How to decide the number
        of lines for averaging
Annex D (informative) - Reference materials for
        magnification calibration
Annex E (informative) - Example of test report for
        calibration of TEM magnification
Bibliography

Defines a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM).

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).