DIN 28400-4:1976-03
Withdrawn
VACUUM TECHNOLOGY - TERMS AND DEFINITIONS, VACUUM COATING
01-12-2013
08-01-2002
1 Allgemeine Begriffe
1.1 Vakuumbeschichten
1.2 Substrat/Beschichtungsgut
1.3 Beschichtungsmaterialien/Beschichtungssubstanzen
1.4 Schichtmaterial (Schichtsubstanz)
1.5 Beschichtungsrate (flächenbezogen)
1.6 Bedampfungswinkel
2 Verfahren
2.1 Verfahren zum Vakuumbedampfen und
Vakuumverdampfen
2.2 Verfahren zum Vakuumbestäuben und Vakuumzerstäuben
2.3 Hilfsverfahren
3 Spezifische Bauteile
3.1 Beschichtungskammer
3.2 Verdampfereinrichtung
3.3 Zerstäubungseinrichtung
3.4 Abdeckvorrichtungen
3.5 Haltevorrichtungen, Aufnahmevorrichtungen,
Wechselvorrichtungen
3.6 Substratheizung
3.7 Substratkühlung
3.8 Glimmeinrichtung
4 Vakuumbeschichtungsanlagen
4.1 Art des Beschichtungsverfahrens
4.2 Bewegungszustand des Substrats
4.3 Durchlaufbeschichtungsanlage
4.4 Schleusenbeschichtungsanlage
4.5 Einzel- und Massengutbeschichtungsanlagen
| DocumentType |
Standard
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Withdrawn
|
| DIN 28400-7:1978-07 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM METALLURGY |
| DIN 28402:1976-12 | Vacuum technology; quantities, symbols, units, summary |
| DIN 28418-1:1976-05 | VACUUM TECHNOLOGY; STANDARD METHOD FOR VACUUM GAUGE CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE VACUUM GAUGE |
| DIN 65099-6:1989-11 | AEROSPACE; CLASSIFICATION OF SPECIAL WORKSHOP FACILITIES; PROCESS GROUP E; COATING |
| DIN 41848-1:1983-07 | INTEGRATED FILM CIRCUITS; TERMS AND DEFINITIONS |
| DIN 28428:1978-11 | Vacuum technology; acceptance specifications for turbomolecular pumps |
| DIN 28427:1983-02 | VACUUM TECHNOLOGY; ACCEPTANCE SPECIFICATIONS FOR DIFFUSIONS PUMPS AND VAPOUR JET VACUUM PUMPS FOR VAPOUR PRESSURES OF THE PUMP FLUID <1 MBAR |
| DIN 28403:1986-09 | VACUUM TECHNOLOGY - QUICK RELEASE COUPLINGS - CLAMPED TYPE COUPLINGS |
| DIN 28400-1:1990-05 | VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - GENERAL TERMS |
| DIN 28402:1976-12 | Vacuum technology; quantities, symbols, units, summary |
| DIN 28400-5:1981-03 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS; VACUUM DRYING AND LYOPHILISATION |
| DIN 28400-3:2013-06 | VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - PART 3: VACUUM GAUGES |
| DIN 28426-1:1983-08 | Vacuum technology; acceptance specifications for rotary plunger vacuum pumps, sliding vane rotary vacuum pumps and rotary piston vacuum pumps for the ranges of rough and medium vacuum |
| DIN 28401:2008-03 | Vacuum technology - Graphical symbols - Summary |
| DIN 28411:1976-03 | Vacuum technology; acceptance specifications for mass spectrometer-type leak-detector, terms |
| DIN 28426-2:1976-03 | Vacuum technology; acceptance specifications for roots vacuum pumps for the range of medium vacuum |
| DIN 28400-2:1980-10 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM PUMPS |
| DIN 28416:1976-03 | VACUUM TECHNOLOGY; CALIBRATION OF VACUUM GAUGES WITHIN THE RANGE OF 10-3 TO 10-7 MBAR, GENERAL METHOD: PRESSURE REDUCTION BY CONTINUOUS FLOW |
| DIN 28404:1986-10 | VACUUM TECHNOLOGY - FLANGES - DIMENSIONS |
| DIN 28418-1:1976-05 | VACUUM TECHNOLOGY; STANDARD METHOD FOR VACUUM GAUGE CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE VACUUM GAUGE |