DIN 50451-2:2003-04
Withdrawn
Determination of trace elements in liquids for use in semiconductor technology - Part 2: Determination of calcium, chromium, cobalt, copper, iron, nickel and zinc in hydrofluoric acid by plasma emission spectroscopy
Hardcopy , PDF
English, German
04-01-2003
10-02-2023
Foreword
1 Scope
2 Normative references
3 Concept
4 Unit
5 Principle
6 Reagents
7 Apparatus and cleaning
8 Sampling
9 Sample pretreatment
10 Preparation of blank solutions
11 Procedure
12 Calculation and expression of results
13 Precision
14 Test report
The method described serves to examine, by plasma-induced (ICP or DCP) spectrometry, hydrofluoric acid for the presence of cobalt (Co), chromium (Cr), copper (Cu) and iron (Fe) and nickel (Ni) in amounts of 1 to 1000 ng/g. The presence of these metals is of relevance in the field of semi-conductor technology.
| DocumentType |
Standard
|
| Pages |
4
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Withdrawn
|
| Supersedes |
| DIN EN ISO 14644-1:2016-06 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
| DIN 51401-1:2001-12 | ATOMIC ABSORPTION SPECTROMETRY (AAS) - PART 1: TERMS |
| ISO 1042:1998 | Laboratory glassware — One-mark volumetric flasks |
| DIN 51008-2:2001-12 | OPTICAL EMISSION SPECTROMETRY (OES) - PART 2: TERMS FOR FLAME AND PLASMA SYSTEMS |
| DIN 8120-1:1981-07 | WEIGHING MACHINES; TERMS AND DEFINITIONS |
| DIN 32645:2008-11 | CHEMICAL ANALYSIS - DECISION LIMIT, DETECTION LIMIT AND DETERMINATION LIMIT UNDER REPEATABILITY CONDITIONS - TERMS, METHODS, EVALUATION |
| ISO 8655-2:2002 | Piston-operated volumetric apparatus — Part 2: Piston pipettes |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration |
| ISO 3696:1987 | Water for analytical laboratory use — Specification and test methods |
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