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DIN EN 62047-10:2012-03

Current

Current

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS (IEC 62047-10:2011)

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

01-01-2012

US$109.60
Excluding Tax where applicable

DevelopmentNote
Supersedes DIN IEC 62047-10. (03/2012)
DocumentType
Standard
Pages
13
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current
Supersedes

Standards Relationship
EN 62047-10:2011 Identical
IEC 62047-10:2011 Identical

US$109.60
Excluding Tax where applicable