DIN IEC 62047-8:2008-05 (Draft)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 8: STRIP BENDING TEST METHOD FOR TENSILE PROPERTY MEASUREMENT OF THIN FILMS
12-01-2011
01-12-2013
In diesem Dokument wird das Streifen-Biege-Prüfverfahren (en: strip-bending test method) zur Messung von Zugbeanspruchungsmerkmalen bei dünnen Schichten mit hoher Genauigkeit und Wiederholbarkeit festgelegt, und das bei einem vertretbaren Aufwand für das Einrichten und das Handling der Prüflinge im Vergleich zur Mikro-Zugbeanspruchungsprüfung.
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