EN ISO 14644-16 : 2019
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019)
Published date
06-19-2019
Publisher
This document gives guidance and recommendations for optimizing energy usage and maintaining energy efficiency in new and existing cleanrooms, clean zones and separative devices.
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