ISO 14644-10:2013
Withdrawn
View Superseded by
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Hardcopy , PDF
English, French
03-01-2013
04-09-2025
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-10:2013 | Identical |
| I.S. EN ISO 14644-10:2013 | Equivalent |
| BS EN ISO 14644-10:2013 | Equivalent |
| DIN EN ISO 14644-10:2013-06 | Equivalent |
| UNE-EN ISO 14644-10:2014 | Identical |
| BS EN ISO 14644-10:2013 | Identical |
| I.S. EN ISO 14644-3:2019&LC:2020 | Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06) |
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