ISO 5302:2003
Withdrawn
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
Hardcopy , PDF
English, French
07-11-2003
02-21-2019
ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.
| DevelopmentNote |
Supersedes ISO/DIS 5302 (07/2003)
|
| DocumentType |
Standard
|
| Pages |
14
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| Standards | Relationship |
| PN ISO 5302 : 2005 | Identical |
| NEN ISO 5302 : 2003 | Identical |
| ISO 3529-2:1981 | Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms |
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