ISO/FDIS 14644-15
Superseded
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
Hardcopy , PDF
English, French
11-02-2025
05-12-2026
This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO14644-8).
This document does not apply to the following:
- design details of equipment.
| Committee |
ISO/TC 209
|
| DocumentType |
Draft
|
| Pages |
19
|
| PublisherName |
International Organization for Standardization
|
| Status |
Superseded
|
| Supersedes |
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