ISO/FDIS 25178-604
Superseded
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
Hardcopy , PDF
English, French
11-13-2024
02-14-2025
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
| Committee |
ISO/TC 213
|
| DocumentType |
Draft
|
| Pages |
23
|
| PublisherName |
International Organization for Standardization
|
| RevisionOf | |
| Status |
Superseded
|
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