ISO/TS 25138:2025
Current
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
Hardcopy , PDF
English
02-20-2025
This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 5nm to 10000nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
| Committee |
ISO/TC 201/SC 8
|
| DocumentType |
Technical Specification
|
| Pages |
39
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| PD ISO/TS 25138:2025 | Identical |
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