JIS B 9920:1989
Superseded
View Superseded by
Measuring methods for airborne particles in clean room and evaluating methods for air cleanliness of clean room
English
01-31-1990
10-28-2013
This Japanese Industrial Standard specifies the measuring methods for concentrations of the airborne particles in clean rooms, and the evaluating methods for the air cleanlinesses of clean room.
| DocumentType |
Standard
|
| Pages |
33
|
| PublisherName |
Japanese Standards Association
|
| Status |
Superseded
|
| SupersededBy |
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