JIS B 9960-33:2012
Current
Safety of machinery -- Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment Part 33: Requirements for semiconductor fabrication equipment
English
05-21-2012
This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
| DocumentType |
Standard
|
| Pages |
124
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| IEC 60204-33:2009 | Identical |
Reaffirmed 2017
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