JIS C 5630-12:2014
Current
Current
Semiconductor devices -- Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Published date
02-20-2014
Publisher
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| DocumentType |
Standard
|
| ProductNote |
Japanese PDF version unavailable from Intertek Inform.
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-12:2011 | Identical |
2014 [20/02/2014]
Summarise
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