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JIS C 5630-30:2020

Current

Current

Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Published date

03-23-2020

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DocumentType
Standard
ProductNote
Japanese PDF version unavailable from Intertek Inform.
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
IEC 62047-30:2017 Identical

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